Yuan Li
Yuan Li
School of Mechanical Engineering, Southeast University
Verified email at seu.edu.cn
Title
Cited by
Cited by
Year
Simulation of microloading and ARDE in DRIE
MA Gosalvez, Y Zhou, Y Zhang, G Zhang, Y Li, Y Xing
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
152015
Transient and stable profiles during anisotropic wet etching of quartz
Y Xing, MA Gosalvez, H Zhang, Y Li, X Qiu
Journal of Microelectromechanical Systems 26 (5), 1063-1072, 2017
72017
Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching
Y Li, MA Gosálvez, P Pal, K Sato, Y Xing
Journal of Micromechanics and Microengineering 25 (5), 055023, 2015
72015
Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz
H Zhang, Y Xing, Y Li, MA Gosálvez, X Qiu
Sensors and Actuators A: Physical 256, 24-34, 2017
62017
Fluctuations During Anisotropic Etching: Local Recalibration and Application to Si {110}
MA Gosálvez, Y Li, N Ferrando, P Pal, K Sato, Y Xing
Journal of Microelectromechanical Systems, 2016
62016
Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton
Y Li, Y Xing, MA Gosalvez, P Pal, Y Zhou
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS …, 2013
52013
The study of self-limited state profile and level set simulation of anisotropic wet etching on quartz
Y Xing, H Zhang, PP Cai, Y Li
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
42017
An experiment-based method for focused ion beam milling profile calculation and process design
Y Li, Y Xing, C Fang, Q Chen, X Qiu
Sensors and Actuators A: Physical 286, 78-90, 2019
22019
Evolutionary kinetic monte carlo method for the simulation of anisotropic etching of z-cut, at-cut and bt-cut quartz
H Zhang, Y Xing, J Zhang, MA Gosálvez, Y Li, Y Zhang
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
22017
The application of level set method for simulation of PECVD/LPCVD processes
SS Singh, Y Li, Y Xing, P Pal
Proceedings of the Physics of Semiconductor Devices: 17th International …, 2013
22013
An experiment-based model for focused ion beam simulation and the process design optimization
Y Li, Y Xing, H Zhang, X Qiu
2018 IEEE Micro Electro Mechanical Systems (MEMS), 487-490, 2018
2018
Modeling and Simulation of Thin Film Deposition on 3-Dimensional MEMS Structures
PP Sajal Sagar Singh, Xing Yan, Li Yuan
International Conference on Advance Trends in Engineering, Technology and …, 2014
2014
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Articles 1–12