Follow
Ville Kaajakari
Ville Kaajakari
Murata Electronics
Verified email at kaajakari.net - Homepage
Title
Cited by
Cited by
Year
Nonlinear limits for single-crystal silicon microresonators
V Kaajakari, T Mattila, A Oja, H Seppa
Journal of Microelectromechanical systems 13 (5), 715-724, 2004
4922004
Practical mems
V Kaajakari
(No Title), 2009
4182009
Practical mems
V Kaajakari
(No Title), 2009
4182009
Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
V Kaajakari, T Mattila, A Oja, J Kiihamaki, H Seppa
IEEE Electron Device Letters 25 (4), 173-175, 2004
2532004
Nonlinear mechanical effects in silicon longitudinal mode beam resonators
V Kaajakari, T Mattila, A Lipsanen, A Oja
Sensors and Actuators A: Physical 120 (1), 64-70, 2005
1322005
Phase noise in capacitively coupled micromechanical oscillators
V Kaajakari, JK Koskinen, T Mattila
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005
1232005
Square-extensional mode single-crystal silicon micromechanical RF-resonator
V Kaajakari, T Mattila, A Oja, J Kiihamaki, H Kattelus, M Koskenvuori, ...
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
972003
Stability of wafer level vacuum encapsulated single-crystal silicon resonators
V Kaajakari, J Kiihamäki, A Oja, S Pietikäinen, V Kokkala, H Kuisma
Sensors and Actuators A: Physical 130, 42-47, 2006
932006
Ultrasonic actuation for MEMS dormancy-related stiction reduction
V Kaajakari, SH Kan, LJ Lin, A Lal, MS Rodgers
MEMS Reliability for Critical Applications 4180, 60-65, 2000
542000
Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity
V Kaajakari, A Lal
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
462001
Thermokinetic actuation for batch assembly of microscale hinged structures
V Kaajakari, A Lal
Journal of microelectromechanical systems 12 (4), 425-432, 2003
442003
Multi-mode frequency synthesizer with temperature compensation
T Mattila, O Jaakkola, V Kaajakari, A Oja, H Seppä
US Patent 7,145,402, 2006
432006
Multi-mode frequency synthesizer with temperature compensation
T Mattila, O Jaakkola, V Kaajakari, A Oja, H Seppä
US Patent 7,145,402, 2006
432006
Multi-mode frequency synthesizer with temperature compensation
T Mattila, O Jaakkola, V Kaajakari, A Oja, H Seppä
US Patent 7,145,402, 2006
432006
Nonlinearities in single-crystal silicon micromechanical resonators
V Kaajakari, T Mattila, J Kiihamaki, H Kattelus, A Oja, H Seppa
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
392003
Ultrasonically driven surface micromachined motor
V Kaajakari, S Rodgers, A Lal
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
382000
Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator
M Koskenvuori, V Kaajakari, T Mattila, I Tittonen
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008
352008
Microstructured polymer for shoe power generation
D Han, V Kaajakari
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
322009
Small gear publishing
V Kaajakari
Las Vegas, Nevada, 2009
292009
Practical MEMS: Analysis and design of microsystems, MEMS sensors, electronics, actuators, rf mems, optical mems, and microfluidic systems
V Kaajakari
Small Gear Publishing, 2009
292009
The system can't perform the operation now. Try again later.
Articles 1–20