| An atomistic introduction to anisotropic etching MA Gosálvez, K Sato, AS Foster, RM Nieminen, H Tanaka Journal of Micromechanics and Microengineering 17 (4), S1, 2007 | 122 | 2007 |
| Surface morphology during anisotropic wet chemical etching of crystalline silicon MA Gosálvez, RM Nieminen New Journal of Physics 5 (1), 100, 2003 | 122 | 2003 |
| Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH P Pal, K Sato, M Shikida, MA Gosálvez Sensors and actuators A: Physical 154 (2), 192-203, 2009 | 76 | 2009 |
| Improvement in smoothness of anisotropically etched silicon surfaces: effects of surfactant and TMAH concentrations D Cheng, MA Gosálvez, T Hori, K Sato, M Shikida Sensors and Actuators A: Physical 125 (2), 415-421, 2006 | 76 | 2006 |
| Orientation-and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for … MA Gosalvez, B Tang, P Pal, K Sato, Y Kimura, K Ishibashi Journal of Micromechanics and Microengineering 19 (12), 125011, 2009 | 68 | 2009 |
| Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants P Pal, K Sato, MA Gosalvez, M Shikida Journal of Micromechanics and Microengineering 17 (11), 2299, 2007 | 68 | 2007 |
| Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments MA Gosalvez, RM Nieminen, P Kilpinen, E Haimi, V Lindroos Applied surface science 178 (1-4), 7-26, 2001 | 66 | 2001 |
| Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy P Pal, K Sato, MA Gosalvez, Y Kimura, KI Ishibashi, M Niwano, H Hida, ... Journal of microelectromechanical systems 18 (6), 1345-1356, 2009 | 60 | 2009 |
| Complex chiral colloids and surfaces via high-index off-cut silicon KM McPeak, CD Van Engers, M Blome, JH Park, S Burger, MA Gosalvez, ... Nano letters 14 (5), 2934-2940, 2014 | 56 | 2014 |
| Analytical solution of the continuous cellular automaton for anisotropic etching MA Gosálvez, Y Xing, K Sato Journal of microelectromechanical systems 17 (2), 410-431, 2008 | 50 | 2008 |
| Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon MA Gosálvez, AS Foster, RM Nieminen Applied Surface Science 202 (3-4), 160-182, 2002 | 50 | 2002 |
| Ellipsometry study of the adsorbed surfactant thickness on Si {1 1 0} and Si {1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH B Tang, P Pal, MA Gosalvez, M Shikida, K Sato, H Amakawa, S Itoh Sensors and Actuators A: Physical 156 (2), 334-341, 2009 | 47 | 2009 |
| Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces N Ferrando, MA Gosalvez, J Cerdá, R Gadea, K Sato Computer Physics Communications 182 (3), 628-640, 2011 | 44 | 2011 |
| Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures Y Xing, MA Gosalvez, K Sato New Journal of Physics 9 (12), 436, 2007 | 43 | 2007 |
| Atomistic methods for the simulation of evolving surfaces MA Gosálvez, Y Xing, K Sato, RM Nieminen Journal of Micromechanics and Microengineering 18 (5), 055029, 2008 | 42 | 2008 |
| Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples MA Gosalvez, P Pal, N Ferrando, H Hida, K Sato Journal of micromechanics and microengineering 21 (12), 125007, 2011 | 41 | 2011 |
| Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples MA Gosalvez, P Pal, N Ferrando, H Hida, K Sato Journal of micromechanics and microengineering 21 (12), 125007, 2011 | 41 | 2011 |
| Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples KS M. A. Gosálvez, Prem Pal, N. Ferrando J. Micromech. Microeng. 21 21, 125008, 2011 | 41* | 2011 |
| Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution P Pal, K Sato, MA Gosalvez, B Tang, H Hida, M Shikida Journal of Micromechanics and Microengineering 21 (1), 015008, 2010 | 37 | 2010 |
| Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: etching mechanism and advanced applications P Pal, MA Gosalvez, K Sato Japanese Journal of Applied Physics 49 (5R), 056702, 2010 | 35 | 2010 |
Dr. Prem PalProfessor, Dept. of Physics, IIT Hyderabad, IndiaVerified email at iith.ac.in
