Hirotaka Hida
Hirotaka Hida
Associate Professor, Kobe University, Japan
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Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy
P Pal, K Sato, MA Gosalvez, Y Kimura, KI Ishibashi, M Niwano, H Hida, ...
Journal of microelectromechanical systems 18 (6), 1345-1356, 2009
612009
Lead-free piezoelectric MEMS energy harvesters of (K, Na) NbO3 thin films on stainless steel cantilevers
Y Tsujiura, E Suwa, F Kurokawa, H Hida, K Suenaga, K Shibata, I Kanno
Japanese Journal of Applied Physics 52 (9S1), 09KD13, 2013
472013
Comparison of effective transverse piezoelectric coefficients e31, f of Pb (Zr, Ti) O3 thin films between direct and converse piezoelectric effects
Y Tsujiura, S Kawabe, F Kurokawa, H Hida, I Kanno
Japanese Journal of Applied Physics 54 (10S), 10NA04, 2015
422015
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
MA Gosalvez, P Pal, N Ferrando, H Hida, K Sato
Journal of micromechanics and microengineering 21 (12), 125007, 2011
422011
Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution
P Pal, K Sato, MA Gosalvez, B Tang, H Hida, M Shikida
Journal of Micromechanics and Microengineering 21 (1), 015008, 2010
382010
Fabrication of a quartz tuning-fork probe with a sharp tip for AFM systems
H Hida, M Shikida, K Fukuzawa, S Murakami, K Sato, K Asaumi, Y Iriye, ...
Sensors and Actuators A: Physical 148 (1), 311-318, 2008
332008
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement
K Shimizu, H Sasaki, H Hida, H Fujita, K Obinata, M Shikida, E Nagamori
Biomedical microdevices 12 (2), 247-252, 2010
282010
Airflow energy harvester of piezoelectric thin-film bimorph using self-excited vibration
Y Tsujiura, E Suwa, T Nishi, F Kurokawa, H Hida, I Kanno
Sensors and Actuators A: Physical 261, 295-301, 2017
212017
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining
B Tang, M Shikida, K Sato, P Pal, H Amakawa, H Hida, K Fukuzawa
Journal of Micromechanics and Microengineering 20 (6), 065008, 2010
212010
Chemotaxis assay of plant-parasitic nematodes on a gel-filled microchannel device
H Hida, H Nishiyama, S Sawa, T Higashiyama, H Arata
Sensors and Actuators B: Chemical 221, 1483-1491, 2015
142015
Anisotropic etching on Si {1 1 0}: Experiment and simulation for the formation of microstructures with convex corners
P Pal, MA Gosalvez, K Sato, H Hida, Y Xing
Journal of Micromechanics and Microengineering 24 (12), 125001, 2014
132014
Compositional dependence of Pb (Mg1/3, Nb2/3) O3–PbTiO3 piezoelectric thin films by combinatorial sputtering
F Kurokawa, Y Tsujiura, H Hida, I Kanno
Japanese Journal of Applied Physics 53 (9S), 09PA06, 2014
122014
Compositional dependence of Ba (Zr0. 2Ti0. 8) O3–(Ba0. 7Ca0. 3) TiO3 piezoelectric thin films prepared by combinatorial sputtering
F Kurokawa, A Mori, Y Tsujiura, H Hida, I Kanno
Thin Solid Films 588, 34-38, 2015
112015
Reliability of vibration energy harvesters of metal-based PZT thin films
Y Tsujiura, E Suwa, F Kurokawa, H Hida, I Kanno
Journal of Physics: Conference Series 557 (1), 012096, 2014
112014
Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb (Zr, Ti) O3 thin films by laser lift-off
E Suwa, Y Tsujiura, F Kurokawa, H Hida, I Kanno
Energy Harvesting and Systems 3 (1), 61-67, 2016
102016
Micro fabrication of lead-free (K, Na) NbO3 piezoelectric thin films by dry etching
F Kurokawa, R Yokokawa, H Kotera, F Horikiri, K Shibata, T Mishima, ...
Micro & Nano Letters 7 (12), 1223-1225, 2012
102012
Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering
H Cheng, H Hida, J Ouyang, I Kanno
Ceramics International 43 (1), 1597-1601, 2017
92017
Lead-free piezoelectric MEMS energy harvesters of stainless steel cantilevers
Y Tsujiura, E Suwa, H Hida, K Suenaga, K Shibata, I Kanno
2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013
82013
Simple millimeter-scale robot using Pb (Zr, Ti) piezoelectric thin film actuator on titanium substrate
H Hida, Y Morita, F Kurokawa, Y Tsujiura, I Kanno
Microsystem Technologies 22 (6), 1429-1436, 2016
72016
Measurement of wall shear stress by using micro-fabricated hot-film and floating-element sensors
O TERASHIMA, T SAWADA, Y SAKAI, K NAGATA, H HIDA, M SHIKIDA
Journal of the Japanese Society for Experimental Mechanics 13 (Special_Issue …, 2013
72013
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Articles 1–20