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Fang Fang
Fang Fang
Advisory Engineer, expertised in Metrology & surface Characterization, IBM
Verified email at udel.edu
Title
Cited by
Cited by
Year
Promising Thermoelectric Properties of Commercial PEDOT:PSS Materials and Their Bi2Te3 Powder Composites
B Zhang, J Sun, HE Katz, F Fang, RL Opila
ACS applied materials & interfaces 2 (11), 3170-3178, 2010
5192010
Phase separation and interfacial reaction of high-k HfAlOx films prepared by pulsed-laser deposition in oxygen-deficient ambient
XY Qiu, HW Liu, F Fang, MJ Ha, JM Liu
Applied physics letters 88 (7), 2006
332006
Thermal stability and dielectric properties of ultrathin CaZrOx films prepared by pulsed laser deposition
XY Qiu, HW Liu, F Fang, MJ Ha, XH Zhou, JM Liu
Applied Physics A 81, 1431-1434, 2005
192005
Signal response metrology (SRM): a new approach for lithography metrology
S Pandev, F Fang, YK Kim, J Tsai, A Vaid, L Subramany, D Sanko, ...
Metrology, Inspection, and Process Control for Microlithography XXIX 9424 …, 2015
182015
Interfacial properties of high-k dielectric CaZrOx films deposited by pulsed laser deposition
XY Qiu, HW Liu, F Fang, MJ Ha, ZG Liu, JM Liu
Applied physics letters 88 (18), 2006
152006
Improving OCD time to solution using signal response metrology
F Fang, X Zhang, A Vaid, S Pandev, D Sanko, V Ramanathan, ...
Metrology, Inspection, and Process Control for Microlithography XXX 9778, 51-60, 2016
142016
Scatterometry-based metrology for SAQP pitch walking using virtual reference
T Kagalwala, A Vaid, S Mahendrakar, M Lenahan, F Fang, P Isbester, ...
Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016
142016
Preparation of clean Bi2Te3 and Sb2Te3 thin films to determine alignment at valence band maxima
F Fang, RL Opila, R Venkatasubramanian, T Colpitts
Journal of Vacuum Science & Technology A 29 (3), 2011
132011
Measuring self-aligned quadruple patterning pitch walking with scatterometry-based metrology utilizing virtual reference
T Kagalwala, A Vaid, S Mahendrakar, M Lenahan, F Fang, P Isbester, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (4), 044004-044004, 2016
102016
Metallic iron-based nanoparticles for biomedical applications
H Khurshid, V Tzitzios, L Colak, F Fang, GC Hadjipanayis
Journal of Physics: Conference Series 200 (7), 072049, 2010
92010
Correlation study of actual temperature profile and in-line metrology measurements for within-wafer uniformity improvement and wafer edge yield enhancement
F Fang, A Vaid, A Vinslava, R Casselberry, S Mishra, D Dixit, P Timoney, ...
Metrology, Inspection, and Process Control for Microlithography XXXII 10585 …, 2018
72018
SAQP pitch walk metrology using single target metrology
F Fang, P Herrera, T Kagalwala, J Camp, A Vaid, S Pandev, F Zach
Metrology, Inspection, and Process Control for Microlithography XXXI 10145 …, 2017
32017
Optical metrology solutions for 10nm films process control challenges
S Mahendrakar, A Vaid, K Venkataraman, M Lenahan, S Seipp, F Fang, ...
Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016
32016
Monte Carlo simulation of the spontaneous oscillation in electron-chemical deposition
JML M.J. Ha, F. Fang
European Phys Journal D, 34, 195, 2005
32005
Surface Analysis Meets Microscopy: Chemical Changes in Matisse Paintings
RL Opila, J Church, F Fang, JL Mass
Microscopy and Microanalysis 18 (S2), 896-897, 2012
22012
Chemical and electrical properties of ZnTe based solar cells
F Fang, BE McCandless, RL Opila
2009 34th IEEE Photovoltaic Specialists Conference (PVSC), 001258-001263, 2009
22009
Interfacial microstructure of high-kappa dielectric CaZrOx films deposited by pulse laser deposition in low oxygen pressure
JML X.Y. Qiu, H.W. Liu, F. Fang, M.J. Ha
INTEGRATED FERROELECTRICS 74, 103, 2005
22005
Heat transport in thermoelectrics
Y Wang
Purdue University, 2011
12011
An Interface Kinetics Study of Oxidation Process of Silicon
F Fang, MJ Ha, XY Qiu, JM Liu
Integrated Ferroelectrics 74 (1), 31-43, 2005
12005
New methodologies: Development of focus monitoring on product
X Hao, F Fang, YK Kim, JM Gomez, V Ramanathan, C Sparka, ...
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2017
2017
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Articles 1–20