Andrey Tychkov
Andrey Tychkov
Dr.
Verified email at asml.com
Title
Cited by
Cited by
Year
Degenerate Bose-Fermi mixture of metastable atoms
JM McNamara, T Jeltes, AS Tychkov, W Hogervorst, W Vassen
Physical review letters 97 (8), 080404, 2006
1202006
Metastable helium Bose-Einstein condensate with a large number of atoms
AS Tychkov, T Jeltes, JM McNamara, PJJ Tol, N Herschbach, ...
Physical Review A 73 (3), 031603, 2006
642006
Lithographic apparatus and method
JJM Baselmans, AS Tychkov
US Patent 7,834,980, 2010
242010
Two-color magneto-optical trap for metastable helium
AS Tychkov, JCJ Koelemeij, T Jeltes, W Hogervorst, W Vassen
Physical Review A 69 (5), 055401, 2004
202004
Speckle in optical lithography and its influence on linewidth roughness
O Noordman, A Tychkov, J Baselmans, JG Tsacoyeanes, G Politi, M Patra, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 8 (4), 043002, 2009
192009
Magnetic trapping and evaporative cooling of metastable triplet helium
N Herschbach, P Tol, A Tychkov, W Hogervorst, W Vassen
Journal of Optics B: Quantum and Semiclassical Optics 5 (2), S65, 2003
192003
Atom interferometry with Mg beams
SN Bagayev, VI Baraulya, AE Bonert, AN Goncharov, MR Seydaliev, ...
International Seminar on Novel Trends in Nonlinear Laser Spectroscopy and …, 2001
182001
High densities and optical collisions in a two-colour magneto-optical trap for metastable helium
JCJ Koelemeij, AS Tychkov, T Jeltes, W Hogervorst, W Vassen
Journal of Physics B: Atomic, Molecular and Optical Physics 37 (17), 3501, 2004
102004
Speckle in optical lithography and the influence on line width roughness
O Noordman, A Tychkov, J Baselmans, J Tsacoyeanes, G Politi, M Patra, ...
Optical Microlithography XXII 7274, 72741R, 2009
82009
Bose-Einstein condensation of metastable helium atoms
AS Tychkov
62008
Illumination system, lithographic apparatus and method
AS Tychkov
US Patent 9,360,762, 2016
52016
A large atom number metastable helium Bose-Einstein Condensate
AS Tychkov, T Jeltes, JM McNamara, PJJ Tol, N Herschbach, ...
arXiv preprint cond-mat/0510006, 2005
22005
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus
HM Mulder, AS Tychkov, W Van Schaik
US Patent 10,295,916, 2019
2019
Ultracold metastable helium-4 and helium-3 gases
W Vassen, T Jeltes, JM McNamara, AS Tychkov, W Hogervorst, ...
Laser Spectroscopy, 243-255, 2008
2008
Production of a degenerate Fermi gas of metastable helium-3 atoms
W Vassen, T Jeltes, JM McNamara, AS Tychkov
arXiv preprint cond-mat/0610414, 2006
2006
International Seminar on Novel Trends in Nonlinear Laser Spectroscopy and High-Precision Measurements in Optics
SN Bagaev, VN Zadkov, SM Arakelian
International Seminar on Novel Trends in Nonlinear Laser Spectroscopy and …, 2001
2001
Atom interferometry with Mg beams [4429-03]
SN Bagayev, VI Baraulia, AE Bonert, AN Goncharov, MR Seydaliev, ...
PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 14-25, 2001
2001
Bose-Einstein Condensation of Metastable Helium Atoms
LM Bouter, AS Tychkov
The system can't perform the operation now. Try again later.
Articles 1–18