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Andrey Tychkov
Andrey Tychkov
PhD
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Title
Cited by
Cited by
Year
Degenerate Bose-Fermi mixture of metastable atoms
JM McNamara, T Jeltes, AS Tychkov, W Hogervorst, W Vassen
Physical Review Letters 97 (8), 080404, 2006
1512006
Metastable helium Bose-Einstein condensate with a large number of atoms
AS Tychkov, T Jeltes, JM McNamara, PJJ Tol, N Herschbach, ...
Physical Review A 73 (3), 031603, 2006
782006
Two-color magneto-optical trap for metastable helium
AS Tychkov, JCJ Koelemeij, T Jeltes, W Hogervorst, W Vassen
Physical Review A 69 (5), 055401, 2004
252004
Magnetic trapping and evaporative cooling of metastable triplet helium
N Herschbach, P Tol, A Tychkov, W Hogervorst, W Vassen
Journal of Optics B: Quantum and Semiclassical Optics 5 (2), S65, 2003
252003
Lithographic apparatus and method
JJM Baselmans, AS Tychkov
US Patent 7,834,980, 2010
242010
Speckle in optical lithography and its influence on linewidth roughness
O Noordman, A Tychkov, J Baselmans, J Tsacoyeanes, G Politi, M Patra, ...
Journal of Micro/Nanolithography, MEMS and MOEMS 8 (4), 043002-043002-10, 2009
202009
Atom interferometry with Mg beams
SN Bagayev, VI Baraulya, AE Bonert, AN Goncharov, MR Seydaliev, ...
International Seminar on Novel Trends in Nonlinear Laser Spectroscopy and …, 2001
192001
High densities and optical collisions in a two-colour magneto-optical trap for metastable helium
JCJ Koelemeij, AS Tychkov, T Jeltes, W Hogervorst, W Vassen
Journal of Physics B: Atomic, Molecular and Optical Physics 37 (17), 3501, 2004
172004
Speckle in optical lithography and the influence on line width roughness
O Noordman, A Tychkov, J Baselmans, J Tsacoyeanes, G Politi, M Patra, ...
Optical Microlithography XXII 7274, 596-607, 2009
112009
Bose-Einstein condensation of metastable helium atoms
AS Tychkov
112008
Illumination system, lithographic apparatus and method
AS Tychkov
US Patent 9,360,762, 2016
102016
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus
HM Mulder, AS Tychkov, W Van Schaik
US Patent 10,295,916, 2019
32019
A large atom number metastable helium Bose-Einstein Condensate
AS Tychkov, T Jeltes, JM McNamara, PJJ Tol, N Herschbach, ...
arXiv preprint cond-mat/0510006, 2005
22005
Ultracold metastable Helium-4 and Helium-3 gases
W Vassen, T Jeltes, JM McNamara, AS Tychkov, W Hogervorst, ...
Laser Spectroscopy, 243-255, 2008
12008
Production of a degenerate Fermi gas of metastable helium-3 atoms
W Vassen, T Jeltes, JM McNamara, AS Tychkov
arXiv preprint cond-mat/0610414, 2006
12006
Reflective optical element for a radiation beam
RM Hofstra, AS Tychkov, FCD Deneuville, GHPM Swinkels, PATM Ruijs
US Patent 11,237,491, 2022
2022
Bose-Einstein Condensation of Metastable Helium Atoms
LM Bouter, AS Tychkov
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