Syed Sohail Hussain Naqvi
Syed Sohail Hussain Naqvi
University of Central Asia
Verified email at ucentralasia.org
Title
Cited by
Cited by
Year
Lens scatterometer system employing source light beam scanning means
JR McNeil, SSH Naqvi, SR Wilson
US Patent 5,703,692, 1997
1951997
Multiparameter grating metrology using optical scatterometry
CJ Raymond, MR Murnane, SL Prins, S Sohail, H Naqvi, JR McNeil, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1997
1511997
Metrology of subwavelength photoresist gratings using optical scatterometry
CJ Raymond, MR Murnane, S Sohail, H Naqvi, JR McNeil
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1995
1511995
Simple CD measurement of periodic structures on photomasks
JR McNeil, KC Hickman, SM Gaspar, SSH Naqvi
US Patent 5,164,790, 1992
1261992
Ellipsometric scatterometry for the metrology of sub-0.1-μm-linewidth structures
BK Minhas, SA Coulombe, SSH Naqvi, JR McNeil
Applied optics 37 (22), 5112-5115, 1998
1071998
Scatterometry applied to microelectronics processing
JR McNeil, SSH Naqvi, SM Gaspar, KC Hickman, KP Bishop, LM Milner, ...
Solid state technology 36 (3), 29-32, 1993
81*1993
Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns
SRJ Brueck, X Chen, A Frauenglass, SH Zaidi, J Wilczynski
US Patent 6,233,044, 2001
752001
Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles
SSH Naqvi, RH Krukar, JR McNeil, JE Franke, TM Niemczyk, DM Haaland, ...
JOSA A 11 (9), 2485-2493, 1994
701994
Use of diffracted light from latent images to improve lithography control
KC Hickman, SM Gaspar, KP Bishop, SSH Naqvi, JR McNeil, GD Tipton, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1992
611992
Scatterometry measurement of sub-0.1 μm linewidth gratings
SA Coulombe, BK Minhas, CJ Raymond, S Sohail H. Naqvi, JR McNeil
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998
581998
Linewidth measurement of gratings on photomasks: a simple technique
SSH Naqvi, S Gaspar, K Hickman, K Bishop, JR McNeil
Applied optics 31 (10), 1377-1384, 1992
561992
Sixteen‐megabit dynamic random access memory trench depth characterization using two‐dimensional diffraction analysis
ZR Hatab, JR McNeil, S Sohail H. Naqvi
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1995
541995
Diffractive techniques for lithographic process monitoring and control
S Sohail, H Naqvi, SH Zaidi, SRJ Brueck, JR McNeil
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1994
511994
Grating line shape characterization using scatterometry
KP Bishop, SM Gaspar, LM Milner, SSH Naqvi, JR McNeil
International Conference on the application and Theory of periodic …, 1991
451991
Scatterometry and the simulation of diffraction-based metrology
SSH Naqvi, JR McNeil, RH Krukar, KP Bishop
Microlithogr. World 2 (3), 5-16, 1993
421993
Using scattered light modeling for semiconductor critical dimension metrology and calibration
RH Krukar, SL Prins, DM Krukar, GA Peterson Jr, S Gaspar, JR McNeil, ...
Integrated Circuit Metrology, Inspection, and Process Control VII 1926, 60-71, 1993
381993
Ellipsometric scatterometry for sub-0.1-um CD measurements
SA Coulombe, PC Logofatu, BK Minhas, SSH Naqvi, JR McNeil
Metrology, Inspection, and Process Control for Microlithography XII 3332 …, 1998
371998
Scatterometry for 0.24-0.70 um developed photoresist metrology
MR Murnane, CJ Raymond, SL Prins, SSH Naqvi, JR McNeil
Integrated Circuit Metrology, Inspection, and Process Control IX 2439, 427-436, 1995
361995
Multiparameter CD measurements using scatterometry
CJ Raymond, MR Murnane, SL Prins, SSH Naqvi, JR McNeil, JW Hosch
Metrology, Inspection, and Process Control for Microlithography X 2725, 698-709, 1996
331996
Scatterometry for CD measurements of etched structures
CJ Raymond, SSH Naqvi, JR McNeil
Metrology, Inspection, and Process Control for Microlithography X 2725, 720-728, 1996
331996
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Articles 1–20