| Aluminum-doped zinc oxide transparent conductors deposited by the sol-gel process W Tang, DC Cameron Thin solid films 238 (1), 83-87, 1994 | 507 | 1994 |
| Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition P Poodt, DC Cameron, E Dickey, SM George, V Kuznetsov, GN Parsons, ... Journal of Vacuum Science & Technology A 30 (1), 2012 | 424 | 2012 |
| Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process MJ Alam, DC Cameron Thin solid films 377, 455-459, 2000 | 394 | 2000 |
| Method and apparatus for generating plasma P Soininen, S Sneck, D Cameron US Patent App. 12/808,530, 2011 | 245 | 2011 |
| Preparation and properties of transparent conductive aluminum-doped zinc oxide thin films by sol–gel process MJ Alam, DC Cameron Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (4 …, 2001 | 236 | 2001 |
| MBE‐grown fluoride films: A new class of epitaxial dielectrics RFC Farrow, PW Sullivan, GM Williams, GR Jones, DC Cameron Journal of Vacuum Science and Technology 19 (3), 415-420, 1981 | 219 | 1981 |
| Investigation of annealing effects on sol–gel deposited indium tin oxide thin films in different atmospheres MJ Alam, DC Cameron Thin Solid Films 420, 76-82, 2002 | 207 | 2002 |
| Preparation and Characterization of TiO2 Thin Films by Sol-Gel Method MJ Alam, DC Cameron Journal of sol-gel science and technology 25, 137-145, 2002 | 207 | 2002 |
| Electroluminescent zinc sulphide devices produced by sol-gel processing W Tang, DC Cameron Thin Solid Films 280 (1-2), 221-226, 1996 | 189 | 1996 |
| Vibrational properties of carbon nitride films by Raman spectroscopy A Chowdhury, DC Cameron, MSJ Hashmi Thin Solid Films 332 (1-2), 62-68, 1998 | 169 | 1998 |
| Atomic layer deposition: principles, characteristics, and nanotechnology applications T Kääriäinen, D Cameron, ML Kääriäinen, A Sherman John Wiley & Sons, 2013 | 162 | 2013 |
| Characterization of transparent conductive ITO thin films deposited on titanium dioxide film by a sol–gel process MJ Alam, DC Cameron Surface and Coatings Technology 142, 776-780, 2001 | 132 | 2001 |
| Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD” E Ahvenniemi, AR Akbashev, S Ali, M Bechelany, M Berdova, S Boyadjiev, ... Journal of Vacuum Science & Technology A 35 (1), 2017 | 114 | 2017 |
| Titanium dioxide thin films, their structure and its effect on their photoactivity and photocatalytic properties ML Kääriäinen, TO Kääriäinen, DC Cameron Thin Solid Films 517 (24), 6666-6670, 2009 | 110 | 2009 |
| White paper on the future of plasma science and technology in plastics and textiles U Cvelbar, JL Walsh, M Černák, HW de Vries, S Reuter, T Belmonte, ... Plasma Processes and Polymers 16 (1), 1700228, 2019 | 93 | 2019 |
| An atomic layer deposition process for moving flexible substrates PS Maydannik, TO Kääriäinen, DC Cameron Chemical Engineering Journal 171 (1), 345-349, 2011 | 91 | 2011 |
| Effect of surface treatment on the adhesion of DLC film on 316L stainless steel MM Morshed, BP McNamara, DC Cameron, MSJ Hashmi Surface and Coatings Technology 163, 541-545, 2003 | 91 | 2003 |
| Atomic layer deposition on polymer based flexible packaging materials: Growth characteristics and diffusion barrier properties TO Kääriäinen, P Maydannik, DC Cameron, K Lahtinen, P Johansson, ... Thin solid films 519 (10), 3146-3154, 2011 | 90 | 2011 |
| Stress and adhesion in DLC coatings on 316L stainless steel deposited by a neutral beam source MM Morshed, BP McNamara, DC Cameron, MSJ Hashmi Journal of Materials Processing Technology 141 (1), 127-131, 2003 | 90 | 2003 |
| Plasma‐Assisted Atomic Layer Deposition of Al2O3 at Room Temperature TO Kääriäinen, DC Cameron Plasma Processes and Polymers 6 (S1), S237-S241, 2009 | 88 | 2009 |
